Technology for Preparing Nanocrystalline Diamond Coatings by Hot-Filament CVD Method

Zhihang Xue; Jianfeng Wang; Xing Hu

doi:10.62177/jaet.v3i2.1306

Authors

Zhihang Xue Shanghai DianJi University
Jianfeng Wang Shanghai DianJi University
Xing Hu Shanghai DianJi University

DOI:

https://doi.org/10.62177/jaet.v3i2.1306

Keywords:

Hot-filament Chemical Vapor Deposition (HFCVD), Nanocrystalline Diamond Coating (NDC), Preparation Process, Superhard Coating

Abstract

This paper systematically investigates the core technical system for preparing nanocrystalline diamond coatings (NDC) by hot-filament chemical vapor deposition (HFCVD), so as to provide theoretical and process references for the industrial development and cross-field applications of this technology. Nanocrystalline diamond coatings have a grain size of 5–100 nm, combining ultra-high hardness, exceptional surface finish, excellent thermal conductivity and strong chemical inertness. With the merits of low equipment cost, large deposition area and high controllability of process parameters, HFCVD has become the core method for the industrial preparation of NDC. This paper reviews the development history of HFCVD technology and NDC, elaborates on the core processes in preparation including substrate selection, gas source design, hot-filament matching and pretreatment, analyzes the working principle of the equipment, the preparation flow and the optimization mechanism of key process parameters, summarizes the application status of the coatings in multiple fields, clarifies the industrialization bottlenecks of the current technology, and proposes key research directions for future efforts.

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